Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297376 | Silica particle and production method therefor, silica sol, polishing composition, polishing method, method for producing semiconductor wafer and method for producing semiconductor device | Eiji DEJIMA, Naoko Sumitani, Tomohiro Kato, Takeshi Sawai | 2025-05-13 |
| 11862470 | Silica particle and production method therefor, silica sol, polishing composition, polishing method, method for producing semiconductor wafer and method for producing semiconductor device | Eiji DEJIMA, Naoko Sumitani, Tomohiro Kato, Takeshi Sawai | 2024-01-02 |