Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10336851 | Copolymer for semiconductor lithography, resist composition, and method for manufacturing substrate | Atsushi Yasuda | 2019-07-02 |
| 9527938 | Copolymer for lithography and method of manufacturing the same, resist composition, and method of manufacturing substrate | Atsushi Yasuda, Tomoya Oshikiri | 2016-12-27 |