Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4979134 | Method for measuring surface temperature of semiconductor wafer substrate, and heat-treating apparatus | Jiro Arima, Hiroji Tsujimura, Tomonori Narita | 1990-12-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4979134 | Method for measuring surface temperature of semiconductor wafer substrate, and heat-treating apparatus | Jiro Arima, Hiroji Tsujimura, Tomonori Narita | 1990-12-18 |