Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818538 | Wafer holding mechanism for rotary table and method and wafer rotating and holding device | Masaki Tamura, Hideaki Nagai | 2020-10-27 |
| 7364616 | Wafer demounting method, wafer demounting device, and wafer demounting and transferring machine | Masato Tsuchiya, Koichi Saito | 2008-04-29 |