Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305626 | Reactive by-products collection system | Yeon Ju Lee, Woo Yeon WON, Ku Kil Jeong | 2025-05-20 |
| 12195849 | Apparatus for trapping multiple reaction by-products for semiconductor process | Yeon Ju Lee, Jin Woong Kim, Ji Eun Han | 2025-01-14 |
| 12104247 | Apparatus for trapping multiple reaction by-products for semiconductor process | Yeon Ju Lee, Jin Woong Kim, Ji Eun Han | 2024-10-01 |
| 12030007 | Apparatus for trapping reaction by-product created by etching process | Yeon Ju Lee, In Hwan Kim, Ji Eun Han, Sung Won Yoon | 2024-07-09 |
| 11872516 | Apparatus for trapping of reaction by-product with extended available collection area | Yeon Ju Lee, Jun Min Lee, Ji Eun Han | 2024-01-16 |
| 11872515 | Apparatus for trapping of reaction by-product capable of expanding the area for collection by inducing gas flow | Yeon Ju Lee, In Hwan Kim, Jun Min Lee | 2024-01-16 |
| 11623175 | Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower | In Mun Hwang, In Hwan Kim, Jun Min Lee | 2023-04-11 |
| 11562943 | Apparatus for collecting by-product in semiconductor manufacturing process | Yeon Ju Lee, Myung Pil Han | 2023-01-24 |
| 11555243 | Apparatus for trapping reaction by-product produced during organic film deposition process | Yeon Ju Lee, Pyung Hee Son, Jin Woong Kim | 2023-01-17 |
| 11462422 | Apparatus having cooling line for collecting by-product in semiconductor manufacturing process | Yeon Ju Lee, Myung Pil Han | 2022-10-04 |
| 11462421 | Apparatus for collecting by-product of semiconductor manufacturing process | Yeon Ju Lee, Ji Su Kim | 2022-10-04 |
| 11173439 | Flow path switching type collecting apparatus of by-product for semiconductor manufacturing process | Jae-Jun Lee, Myung Pil Han | 2021-11-16 |
| 11117086 | Apparatus for collecting by-product of semiconductor manufacturing process | Jae-Jun Lee, Myung Pil Han | 2021-09-14 |
| 11054174 | Semiconductor process by-product collecting device | Kyu Hyun Hwang, Nak Jin Choi, Tae Yeon Kim, Kyung Tae Kim | 2021-07-06 |
| 10987619 | Apparatus for collecting by-product in semiconductor manufacturing process | Pyung Hee Son, Ye Jin Kim, Ji Su Kim | 2021-04-27 |
| 10801107 | Apparatus for collecting by-product in semiconductor process | Kyung Tae Kim, Myung Pil Han, Myoung Hoon Jung | 2020-10-13 |
| 7988755 | Byproduct collecting apparatus of semiconductor apparatus | Jung Eui Hong, Tae Woo Kim, In Mun Hwang | 2011-08-02 |
| 7892320 | Automatically replaceable apparatus for collecting byproducts and the controlling method thereof in equipment producing semiconductor | Seung Il Lee, Young-jun Yun | 2011-02-22 |