Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8016114 | Reduction of electric-field-induced damage in field-sensitive articles | Joseph A. Durben, Robert K. Lindsley | 2011-09-13 |
| 7775363 | High cleanliness article transport system | Joseph A. Durben, Robert K. Lindsley | 2010-08-17 |
| 7691547 | Reticle containing structures for sensing electric field exposure and a method for its use | — | 2010-04-06 |
| 7581372 | High cleanliness article transport system | Joseph A. Durben, Robert K. Lindsley | 2009-09-01 |
| 7061583 | Lithography apparatus | Johannesq Catharinus Hubertus Mulkens, Jan Wietse Ricolt Ten Cate | 2006-06-13 |
| 6452662 | Lithography apparatus | Johannesq Catharinus Hubertus Mulkens, Jan Wietse Ricolt Ten Cate | 2002-09-17 |