Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817392 | Photolithography systems and associated methods of overlay error correction | — | 2017-11-14 |
| 9195149 | Photolithography systems and associated methods of overlay error correction | — | 2015-11-24 |
| 9052604 | Photolithography systems and associated alignment correction methods | — | 2015-06-09 |
| 8313877 | Photolithography monitoring mark, photolithography mask comprising an exposure monitoring mark, and phase shift mask comprising an exposure monitoring mark | — | 2012-11-20 |
| 8260449 | Photolithography systems and associated methods of overlay error correction | — | 2012-09-04 |
| 8203695 | Photolithography systems and associated methods of focus correction | — | 2012-06-19 |
| 7557444 | Power-via structure for integration in advanced logic/smart-power technologies | Achim Gratz, Jakob Kriz | 2009-07-07 |