Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478978 | Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers | — | 2002-11-12 |
| 6479393 | Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers | — | 2002-11-12 |
| 6235213 | Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers | — | 2001-05-22 |