Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7683021 | Methods of removing metal-containing materials | Kevin R. Shea | 2010-03-23 |
| 7642196 | Semiconductor fabrication processes | Kevin R. Shea | 2010-01-05 |
| 7557013 | Methods of forming a plurality of capacitors | Vishwanath Bhat, Shyam Surthi | 2009-07-07 |
| 7541635 | Semiconductor fabrication using a collar | Kevin J. Torek, Kevin R. Shea, Zhiping Yin | 2009-06-02 |
| 7368416 | Methods of removing metal-containing materials | Kevin R. Shea | 2008-05-06 |
| 7297639 | Methods for etching doped oxides in the manufacture of microfeature devices | — | 2007-11-20 |
| 7244682 | Methods of removing metal-containing materials | Kevin R. Shea | 2007-07-17 |
| 7109089 | Semiconductor fabrication using a collar | Kevin J. Torek, Kevin R. Shea, Zhiping Yin | 2006-09-19 |