Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280043 | Method for repairing mask for EUV exposure and mask for EUV exposure | — | 2016-03-08 |
| 7789964 | Method for cleaning a surface of a photomask | Christian Chovino | 2010-09-07 |
| 7569314 | Method for quartz bump defect repair with less substrate damage | Baorui Yang | 2009-08-04 |
| 7309549 | Method for quartz bump defect repair with less substrate damage | Baorui Yang | 2007-12-18 |
| 6933081 | Method for quartz bump defect repair with less substrate damage | Baorui Yang | 2005-08-23 |