Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8488105 | Multi-table lithographic systems, lithography processing tools and methods for processing workpieces | — | 2013-07-16 |
| 8467117 | Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise | Torbjorn Hedevarn | 2013-06-18 |
| 8314941 | Cartesian coordinate measurement for rotating system | — | 2012-11-20 |