Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6122035 | Lithographic system and method for exposing a target utilizing unequal stepping distances | — | 2000-09-19 |
| 6057065 | Lithographic system having diffraction grating and attenuated phase shifters | — | 2000-05-02 |
| 5851701 | Atom lithographic mask having diffraction grating and attenuated phase shifters | — | 1998-12-22 |
| 5780188 | Lithographic system and method for exposing a target utilizing unequal stepping distances | — | 1998-07-14 |
| 5759724 | Method for making multi-phase, phase shifting masks | — | 1998-06-02 |