Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885493 | Method and a device for reducing hysteresis or imprinting in a movable micro-element | Ulric Ljungblad, Peter DÜRR | 2005-04-26 |
| 6624880 | Method and apparatus for microlithography | Torbjorn Sandstrom, Peter DÜRR | 2003-09-23 |