Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169014 | Apparatuses for controlling the temperature of polishing pads used in planarizing micro-device workpieces | Theodore M. Taylor, Larry Birch | 2007-01-30 |
| 7033253 | Polishing pad conditioners having abrasives and brush elements, and associated systems and methods | — | 2006-04-25 |