Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7060629 | Etch of silicon nitride selective to silicon and silicon dioxide useful during the formation of a semiconductor device | — | 2006-06-13 |
| 6716759 | Etch of silicon nitride selective to silicon and silicon dioxide useful during the formation of a semiconductor device | — | 2004-04-06 |