Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6737356 | Method of fabricating a semiconductor work object | — | 2004-05-18 |
| 6375792 | Methods and apparatuses for removing material from discrete areas on a semiconductor wafer | Richard H. Lane | 2002-04-23 |
| 6376390 | Methods and apparatuses for removing material from discrete areas on a semiconductor wafer | Richard H. Lane | 2002-04-23 |
| 6358129 | Backing members and planarizing machines for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods of making and using such backing members | — | 2002-03-19 |
| 6319420 | Method and apparatus for electrically endpointing a chemical-mechanical planarization process | — | 2001-11-20 |
| 6190494 | Method and apparatus for electrically endpointing a chemical-mechanical planarization process | — | 2001-02-20 |
| 6153532 | Methods and apparatuses for removing material from discrete areas on a semiconductor wafer | Richard H. Lane | 2000-11-28 |