Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5991965 | Apparatus for dry-cleaning dust-contaminated auxiliary objects for handling and storing semiconductor wafers | Ruediger Joachim Stroh, Martin Trefzer, Uwe Thomas, Erich Allmann, Craig A. Coad | 1999-11-30 |