Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460554 | Apparatus for rinsing and drying semiconductor wafers in a chamber with a movable side wall | — | 2002-10-08 |
| 6383304 | Method of rinsing and drying semiconductor wafers in a chamber with a movable side wall | — | 2002-05-07 |
| 6354313 | Apparatus for rinsing and drying semiconductor wafers in a chamber with a movable side wall | — | 2002-03-12 |
| 6165277 | Method of rinsing and drying semiconductor wafers in a chamber with a movable side wall | — | 2000-12-26 |
| 6095167 | Rinse/dry apparatus including a chamber with a moveable side wall | — | 2000-08-01 |
| 5985041 | Method of rinsing and drying semiconductor wafers in a chamber with a movable side wall | — | 1999-11-16 |
| 5913981 | Method of rinsing and drying semiconductor wafers in a chamber with a moveable side wall | — | 1999-06-22 |