Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6106980 | Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems | Christophe Pierrat | 2000-08-22 |
| 6103430 | Method for repairing bump and divot defects in a phase shifting mask | — | 2000-08-15 |
| 6096459 | Method for repairing alternating phase shifting masks | — | 2000-08-01 |
| 6037087 | Method to accurately correlate defect coordinates between photomask inspection and repair systems | Christophe Pierrat | 2000-03-14 |
| 6030731 | Method for removing the carbon halo caused by FIB clear defect repair of a photomask | — | 2000-02-29 |
| 5798193 | Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems | Christophe Pierrat | 1998-08-25 |