Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987657 | Spatial filter measuring arrangement, device, and associated method having a mirror array with movable mirror elements for generating a grating structure | Martin Degner, Nils Damaschke, Martin Schaeper | 2015-03-24 |