Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11931682 | Waste gas abatement technology for semiconductor processing | — | 2024-03-19 |
| 11786858 | Liquid filter apparatus for gas/solid separation for semiconductor processes | — | 2023-10-17 |
| 11705345 | Semiconductor system with steam generator and reactor | — | 2023-07-18 |
| 8178987 | Wind turbine | — | 2012-05-15 |
| 8049351 | Turbine energy generating system | — | 2011-11-01 |
| 6965092 | Ultra fast rapid thermal processing chamber and method of use | — | 2005-11-15 |
| 6800830 | Chemistry for boron diffusion barrier layer and method of application in semiconductor device fabrication | — | 2004-10-05 |
| 6783627 | Reactor with remote plasma system and method of processing a semiconductor substrate | — | 2004-08-31 |
| 6617538 | Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements | — | 2003-09-09 |
| 6544339 | Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processing | — | 2003-04-08 |
| 6530994 | Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing | — | 2003-03-11 |
| RE37546 | Reactor and method of processing a semiconductor substrate | — | 2002-02-12 |
| 6310323 | Water cooled support for lamps and rapid thermal processing chamber | John M. Arend | 2001-10-30 |
| 6090212 | Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrate | — | 2000-07-18 |
| 6007635 | Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing | — | 1999-12-28 |
| 5951896 | Rapid thermal processing heater technology and method of use | — | 1999-09-14 |
| 5814365 | Reactor and method of processing a semiconductor substate | — | 1998-09-29 |
| 5591220 | Fluid replacement apparatus for use with a portable heating and cooling system | — | 1997-01-07 |
| 5486207 | Thermal pad for portable body heating/cooling system and method of use | — | 1996-01-23 |
| 5336249 | Portable body heating/cooling system and method of use | — | 1994-08-09 |
| 5059770 | Multi-zone planar heater assembly and method of operation | — | 1991-10-22 |
| 4993358 | Chemical vapor deposition reactor and method of operation | — | 1991-02-19 |
| 4834022 | CVD reactor and gas injection system | — | 1989-05-30 |
| 4680447 | Cooled optical window for semiconductor wafer heating | — | 1987-07-14 |
| 4673799 | Fluidized bed heater for semiconductor processing | — | 1987-06-16 |