Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11220750 | Shower head and processing device | Yoshiki Morikawa, Toshinori Miura | 2022-01-11 |
| 7772133 | Method and equipment for forming oxide film | Tetsuya Nishiguchi, Shingo Ichimura, Hidehiko Nonaka, Yoshiki Morikawa, Mitsuru Kekura | 2010-08-10 |