Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473396 | Wafer dryer apparatus and method | — | 2019-11-12 |
| 10056271 | Metal etch system | Jeffrey M. Wagner | 2018-08-21 |
| 9829249 | Wafer dryer apparatus and method | — | 2017-11-28 |
| 9562291 | Metal etch system | Jeffrey M. Wagner | 2017-02-07 |
| 9553005 | Metal liftoff tools and methods | — | 2017-01-24 |
| 9070631 | Metal liftoff tools and methods | — | 2015-06-30 |