Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815363 | Method for nanomachining high aspect ratio structures | Wenbing Yun, John R. Spence, Howard A. Padmore, Alastair A. MacDowell | 2004-11-09 |
| 5455850 | X-ray lithography using holographic images | Chris J. Jacobsen | 1995-10-03 |
| 5214685 | X-ray lithography mirror and method of making same | — | 1993-05-25 |