OS

Olaf Stenzel

ME Max-Planck-Gesellschaft Zur Föderung Der Wissenschaften E.V.: 1 patents #1,086 of 3,651Top 30%
Overall (All Time): #3,273,883 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8081317 Electrostatic chuck with anti-reflective coating, measuring method and use of said chuck Gerhard Kalkowski, Wieland Stockl 2011-12-20