KF

Klaus Funk

MG Mattson Thermal Products Gmbh: 1 patents #7 of 26Top 30%
📍 Ottobrunn, DE: #199 of 341 inventorsTop 60%
Overall (All Time): #3,426,820 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7098157 Method and apparatus for thermally treating disk-shaped substrates — 2006-08-29