Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8932406 | In-situ generation of the molecular etcher carbonyl fluoride or any of its variants and its use | Ramkumar Subramanian, Carrie L. Wyse, Robert Torres, Jr. | 2015-01-13 |
| 8623148 | NF3 chamber clean additive | Robert Torres, Jr., Adam Seymour | 2014-01-07 |