Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7651821 | Method and system of lithography using masks having gray-tone features | Brian Tyrrell | 2010-01-26 |
| 7583360 | Method for photolithography using multiple illuminations and a single fine feature mask | Brian Tyrrell | 2009-09-01 |
| 7306881 | Method and system of lithography using masks having gray-tone features | Brian Tyrrell | 2007-12-11 |
| 6934007 | Method for photolithography using multiple illuminations and a single fine feature mask | Brian Tyrrell | 2005-08-23 |
| 6884551 | Method and system of lithography using masks having gray-tone features | Brian Tyrrell | 2005-04-26 |
| 6818389 | Method of design and fabrication of integrated circuits using regular arrays and gratings | Brian Tyrrell | 2004-11-16 |