Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292370 | Coupled microwave ECR and radio-frequency plasma source for plasma processing | Chin-Chi Tsai | 1994-03-08 |
| 4434131 | Neutral beamline with improved ion energy recovery | William K. Dagenhart, William L. Stirling, John H. Whealton | 1984-02-28 |