Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987677 | Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof | Marco Jan-Jaco Wieland | 2015-03-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987677 | Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof | Marco Jan-Jaco Wieland | 2015-03-24 |