Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476117 | Hot tile sputtering system | Ian A. McCabe | 2016-10-25 |
| 8673122 | Hot tile sputtering system | Ian A. McCabe | 2014-03-18 |
| 5987160 | Method and apparatus for inspecting a photoresist material by inducing and detecting fluorescence of the photoresist material | David A. Rockwell | 1999-11-16 |