Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723646 | Method for controlling and monitoring a chemical mechanical polishing process | Chun-Lien Su, Chi-Yuan Chin, Shih-Keng Cho, Ming-Shang Chen | 2004-04-20 |
| 6552360 | Method and circuit layout for reducing post chemical mechanical polishing defect count | Chun-Lien Su, Chi-Yuan Chin, Ming-Shang Chen, Tsung-Hsien Wu | 2003-04-22 |