Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8446565 | Methods of optical proximity correction in manufacturing semiconductor devices | Chung Te Hsuan | 2013-05-21 |
| 8343713 | Method for patterning material layer | Chih-Hao Huang, Chin-Cheng Yang, Tien-Chu Yang | 2013-01-01 |
| 8154705 | Method of defining patterns in small pitch and corresponding exposure system | — | 2012-04-10 |
| 8148051 | Method and system for manufacturing openings on semiconductor devices | Chao-Lung Lo | 2012-04-03 |
| 8072577 | Lithography systems and processes | Ta-Hung Yang, Chih-Yuan Lu | 2011-12-06 |
| 7721247 | Side lobe image searching method in lithography | — | 2010-05-18 |
| 7682756 | Anti-aberration pattern and method for manufacturing the same | Chao-Lung Lo | 2010-03-23 |
| 7588864 | Mask, method of manufacturing mask, and lithographic process | — | 2009-09-15 |