Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703322 | Method of forming multiple oxide layers with different thicknesses in a linear nitrogen doping process | June-Min Yao, Cheng Chen | 2004-03-09 |
| 6602792 | Method for reducing stress of sidewall oxide layer of shallow trench isolation | — | 2003-08-05 |
| 6503815 | Method for reducing stress and encroachment of sidewall oxide layer of shallow trench isolation | — | 2003-01-07 |