Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643873 | Cluster tool apparatus and a method of controlling a cluster tool apparatus | Naiqi Wu, Yan Qiao, Mengchu Zhou, Zhiwu Li | 2020-05-05 |
| 10520914 | Multi cluster tool system and a method of controlling a multi tool cluster system | Naiqi Wu, Liping Bai, Mengchu Zhou, Zhiwu Li | 2019-12-31 |
| 10101721 | System and method for determining an optimized schedule of a production line | Naiqi Wu, Yan Qiao, Mengchu Zhou | 2018-10-16 |
| 10073444 | Petri net-based optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools | Naiqi Wu, Yan Qiao, Mengchu Zhou | 2018-09-11 |
| 9223307 | Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints | Naiqi Wu, Yan Qiao, Mengchu Zhou | 2015-12-29 |