Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10995268 | Etching composition effective to selectively wet etch a silicon nitride film | Sok Ho Lee, Jung Hwan Song, Sung Il Jo, Byeoung Tak Kim, Ah Hyeon Lim +1 more | 2021-05-04 |
| 10689572 | Etchant composition with high selectivity to silicon nitride | Sok Ho Lee, Jung Hwan Song, Sung Il Jo, Byeoung Tak Kim, Na Ra Han +8 more | 2020-06-23 |
| 9869027 | Cleaning composition and method of manufacturing metal wiring using the same | Bong-Yeon Kim, Jin-Ho Ju, Jun Hyuk WOO, Jung Hwan Song, Seok-Ho Lee +1 more | 2018-01-16 |
| 9340759 | Cleaning composition and method of manufacturing metal wiring using the same | Bong-Yeon Kim, Jin-Ho Ju, Jun Hyuk WOO, Jung Hwan Song, Seok-Ho Lee +1 more | 2016-05-17 |