Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831022 | Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber | Michael Berman | 2004-12-14 |
| 6630411 | Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber | Michael Berman | 2003-10-07 |