Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9116436 | Maskless exposure apparatus including spatial filter having phase shifter pattern and exposure method | Younghoon Shin, Kunsoo Kim | 2015-08-25 |
NY
Namyeol Yang
Overall (All Time): #3,067,468 of 4,157,543Top 75%
1
Patents All Time