Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052853 | Sputtering apparatus and method of preventing damage thereof | Jinhee Yun, Munik Na, Seunglyul Lee, Kyoungshik Kim, Junhyung Park +3 more | 2011-11-08 |
| 7820016 | Sputtering apparatus and method of preventing damage thereof | Jinhee Yun, Munik Na, Seunglyul Lee, Kyoungshik Kim, Junhyung Park +3 more | 2010-10-26 |