Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11389922 | Polishing measurement device and abrasion time controlling method thereof, and polishing control system including same | Suk-Jin Jung | 2022-07-19 |
| 10255669 | Defect measuring device for wafers | Chi-Hun Kang | 2019-04-09 |
| 10062574 | Wafer polishing apparatus and method | Jin Woo Ahn | 2018-08-28 |
| 9744641 | Wafer polishing apparatus | — | 2017-08-29 |
| 9724800 | Wafer polishing apparatus | Eun-Suck Choi | 2017-08-08 |
| 9358666 | Slurry supply device and polishing apparatus including the same | Jae-hyun BAE | 2016-06-07 |