Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573186 | Method for forming plug of semiconductor device | — | 2003-06-03 |
| 6573174 | Method for reducing surface defects of semiconductor substrates | Dae-Won Suh | 2003-06-03 |
| 6344391 | Fabrication method of semiconductor device with diagonal capacitor bit line | Chang Jae Lee | 2002-02-05 |
| 6133598 | Semiconductor device with diagonal capacitor bit line and fabrication method thereof | Chang Jae Lee | 2000-10-17 |
| 6096646 | Method for forming metal line of semiconductor device | Chang Jae Lee | 2000-08-01 |
| 6004397 | TEOS-O.sub.3 oxidizing film depositing system and process for supplying ozone (O.sub.3) thereto | Yun-Hee Kim, Young Jin SONG | 1999-12-21 |
| 5891810 | Process for supplying ozone (O.sub.3) to TEOS-O.sub.3 oxidizing film depositing system | Yun-Hee Kim, Young Jin SONG | 1999-04-06 |
| 5801099 | Method for forming interconnection of semiconductor device | Yong Kwon Kim | 1998-09-01 |
| 5792704 | Method for fabricating wiring in semiconductor device | Young Kwon Jun, Yong Kwon Kim, Jin Won Park | 1998-08-11 |
| 5767013 | Method for forming interconnection in semiconductor pattern device | Chang-Soo Kim, Yun-Hee Kim | 1998-06-16 |
| 5663102 | Method for forming multi-layered metal wiring semiconductor element using cmp or etch back | — | 1997-09-02 |