Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5486696 | Procedure and apparatus for the analysis of surface and/or depth profiles | Karl-Heinz Muller | 1996-01-23 |
| 5156703 | Mthod for the surface treatment of semiconductors by particle bombardment | — | 1992-10-20 |
| 5017835 | High-frequency ion source | — | 1991-05-21 |
| 4447724 | Apparatus for the chemical analysis of samples | — | 1984-05-08 |
| 4310759 | System for removal of material from the surface of a sample | — | 1982-01-12 |