Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8758579 | Chamber for physical vapour deposition and door for a physical vapour deposition chamber | Lothar Lippert | 2014-06-24 |
| 5909995 | Transport device for workpieces in a vacuum system | Hans Wolf, Guenter Kemmerer | 1999-06-08 |
| 5538609 | Cathodic sputtering system | Berthold Ocker, Roland Gesche, Mark Saunders | 1996-07-23 |
| 5536380 | Large area sputter cathode having floating target segments | Berthold Ocker | 1996-07-16 |