Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5517085 | Apparatus including ring-shaped resonators for producing microwave plasmas | Frank Werner | 1996-05-14 |
| 5177398 | Grid assembly for ion beam sources and method therefor | — | 1993-01-05 |
| 5021919 | Device for the generation of electrically charged and/or uncharged particles | — | 1991-06-04 |
| 4898557 | Process for preparing extraction grids | — | 1990-02-06 |