Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6092373 | Cryopump | — | 2000-07-25 |
| 5400604 | Cryopump and process for regenerating said cryopump | Hans-Ulrich Hafner, Gerd Flick, Hans-Joachim Forth, Hans-Hermann Klein, Uwe Timm | 1995-03-28 |
| 5221190 | Ion sputtering pump with getter module | Joseph Romer, Gunther Krischer | 1993-06-22 |