Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4907526 | Installation for charging and discharging substrates out of a vacuum tank | Michael Walde, Peter A. Zeidler | 1990-03-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4907526 | Installation for charging and discharging substrates out of a vacuum tank | Michael Walde, Peter A. Zeidler | 1990-03-13 |