Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11673230 | Method and apparatus for removing a conformal coating from a circuit board | — | 2023-06-13 |
| 5982100 | Inductively coupled plasma reactor | — | 1999-11-09 |
| 5556521 | Sputter etching apparatus with plasma source having a dielectric pocket and contoured plasma source | — | 1996-09-17 |
| 5280219 | Cluster tool soft etch module and ECR plasma generator therefor | — | 1994-01-18 |
| 4778561 | Electron cyclotron resonance plasma source | — | 1988-10-18 |