Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5516732 | Wafer processing machine vacuum front end method and apparatus | — | 1996-05-14 |
| 4791791 | Cryosorption surface for a cryopump | John R. Porter | 1988-12-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5516732 | Wafer processing machine vacuum front end method and apparatus | — | 1996-05-14 |
| 4791791 | Cryosorption surface for a cryopump | John R. Porter | 1988-12-20 |