| 11845202 |
Near-field microwave heating system and method |
Robert J. Schauer, Andrew Cardin, Clayton R. DeCamillis, Yunchuan Liu, Andrew Bools |
2023-12-19 |
| 11766833 |
Near-field microwave heating system and method |
Iftikhar Ahmad, Andrew Cardin, Clayton R. DeCamillis, Richard C. Hazelhurst, Angelo Luciano +2 more |
2023-09-26 |
| 11633921 |
Near-field microwave heating system and method |
Iftikhar Ahmad, Andrew Cardin, Clayton R. DeCamillis, Richard C. Hazelhurst, Angelo Luciano +2 more |
2023-04-25 |
| 11633922 |
Near-field microwave heating system and method |
Iftikhar Ahmad, Andrew Cardin, Clayton R. DeCamillis, Richard C. Hazelhurst, Angelo Luciano +2 more |
2023-04-25 |
| 10913212 |
Near-field microwave heating system and method |
Iftikhar Ahmad, Andrew Cardin, Clayton R. DeCamillis, Richard C. Hazelhurst, Angelo Luciano +1 more |
2021-02-09 |
| 10710313 |
Near-field microwave heating system and method |
Iftikhar Ahmad, Andrew Cardin, Clayton R. DeCamillis, Richard C. Hazelhurst |
2020-07-14 |
| 10051693 |
Apparatus and method for heating semiconductor wafers via microwaves |
Joseph M. Wander, Zakaryae Fathi, Clayton R. DeCamillis, Iftikhar Ahmad |
2018-08-14 |
| 9048270 |
Apparatus and method for heating semiconductor wafers via microwaves |
Joseph M. Wander, Zakaryae Fathi, Clayton R. DeCamillis, Iftikhar Ahmad |
2015-06-02 |
| 8021898 |
Method and apparatus for controlled thermal processing |
Iftikhar Ahmad |
2011-09-20 |
| 7939456 |
Method and apparatus for uniform microwave treatment of semiconductor wafers |
Iftikhar Ahmad |
2011-05-10 |
