Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812478 | In-situ detection of thin-metal interface using optical interference via a dynamically updated reference | — | 2004-11-02 |
| 6747283 | In-situ detection of thin-metal interface using high resolution spectral analysis of optical interference | — | 2004-06-08 |
| 6669539 | System for in-situ monitoring of removal rate/thickness of top layer during planarization | — | 2003-12-30 |
| 6664557 | In-situ detection of thin-metal interface using optical interference | — | 2003-12-16 |